Proximity Aligner for Large LCD Substrates TME-550P/750P/950P
- A fully automatic proximity aligner for mass production which exposes the whole surface of a large substrate at once by the proximity method.
- A high transfer printing accuracy achieved through the adoption of a newly-developed lighting optical system, new flexure compensation mechanism and a high-precision thermo-regulation system.
- Substrate transfer, alignment and exposure can be implemented in an optimal sequence. We ensure high productivity and reliability through high throughput and 24-hour continuous operation.
| TME-550P | TME-750P | TME-950P | |
|---|---|---|---|
| Exposure method | Proximity | ||
| Resolution | 7 microns L&S (Different corresponding to the conditions) | ||
| Available substrate size | Max. 400 × 500mm | Max. 650 × 750mm | Max. 730 × 920mm |
| Available mask size | Max. 450 × 550mm | Max. 700 × 800mm | Max. 800 × 960mm |
| Illumination (365 nm) | 30 mW/cm2 (5kW ultra-high-voltage mercury lamp) | 25 mW/cm2 (8kW ultra-high-voltage mercury lamp) | 23 mW/cm2 (10kW ultra-high-voltage mercury lamp) |
| Illumination unevenness | 3.0% or less | ||
| Overlay accuracy | ±1.0 microns | ||
| Gap setting range | 50 to 300 microns | 70 to 300 microns | |
| Gap setting accuracy | ±5 microns | ||
| Processing capacity | 18 sec/piece or shorter (except for the exposure time) | 18 sec/piece or shorter (except for the exposure time) | 20 sec/piece or shorter (except for the exposure time) |
| Mask setting | Automatic | ||
| Dimensions of the system main unit | 3600(W) × 2500(D) × 2600(H)mm | 3600(W) × 3000(D) × 2950(H)mm | 4200(W) × 3500(D) × 3300(H)mm |
| Weight of the system main unit | Approx. 4000kg | Approx. 4000kg | Approx. 5000kg |
| Power supply | 3-phase 200V, 50/60Hz | ||
