Wafer Surface Analyzer WM-10
More sensitivity and Eco-friendly
- In operation widely at semiconductor manufacturers from material to equipment.
- Auto sensitivity adjust as Option.
- Microscratch to COP separation.
| Light Source | Violet LD |
|---|---|
| Scan system | Helical scan |
| Sensitivity | Bare 48nm/ Film 60nm |
| Repeatability | σ /X ≦ 1% |
| Wafer Size | 300/200mm, 200/150mm, (100mm as Option) |
| Wafer Type | Bare Si/ Filmed wafer |
Wafer Surface Analyzer WM-7S
- Enables reducing the running cost drastically with the Violet Laser diode
- Supporting wafers of various sizes (ranging from 50mm to 200mm)
- High performance, low price, easy operation, and space-saving
- Particle information with higher accuracy provided via real-time counting process
- Small foot print
| Light Source | Violet LD |
|---|---|
| Scan system | Helical scan |
| Sensitivity | Bare 80nm |
| Repeatability | σ /X ≦ 1% |
| Wafer Size | 50~200mm |
| Wafer Type | Bare Si/ Filmed wafer |
If you have inquiries regarding this product, please contact TOPCON TECHNOHOUSE CORPORATION from its website. （you will see a new window）
