Optical System Development Field
Through the development of state-of-the-art optical inspection systems, we are developing short wavelength optical design technologies, high accuracy objective lenses, parts, and thin film formation technologies
Inspection Technology for SemiconductorManufacturing Related / Business Unit: Finetech
■ Optical System Technology for Sub 200nm Mask Inspection
- Development of an optical system that uses deep ultraviolet
- Researching technology to improve image quality
- Development of a high accuracy DUV objective lens for a reticle defect inspection system
